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Custom Design and Fabrication

SES offers Teflon Coated Eaton 6200/6200A Ion Implanter End Station components. From load and unload arms, transport arms to wafer picks and clamp rings. Our end station components offer several advantages over the OEM's standard design.

The advantages are: finished components are machined to closer tolerances to provide accurate and repeatable wafer placement.

Teflon's Non-abrasive coating reduces particle generation and eliminates the need for the red silicone rubber pads that are getters for particles.

This is an SES exclusive. Click here to view catalog for more detail.

This improved design can be implemented on other wafer handling systems, so call today with your application and let us find solutions to your problems.