SES Training

The following schedule is for both courses separately. They are not a combined course.

Day 1 & 2
Course Introduction
Discuss safety items and concerns, system specifications & layout
Controllers
Describe full operation and function of all related system controllers and components

Day 2 & 3
Vacuum
Cover description and operation of the old & new style vacuum system controller, layout of the vacuum system plumbing, location of all system valves, with how to pressure check the vacuum system for leaks.

Day 3 & 4
Vacuum
Show how to rebuild system valves: 1.5", BTA, Nupro and the main chamber hi-vacuum valve. Show location & calibration of vacuum TC & RG gauges.

Day 5
Argon System
Show how to set up the system for qualification of the argon line, how to set up the MKS controller & control valve and the proper settings of the "Z" & "SPAN". Show how to set the station argon flow settings for optimum production performance.

Day 6 & 7
Coaxial Feed-through
Show how to remove and rebuild the coaxial feed-through, transfer plate including clip changes, pressure plate / cooling band. Chamber liners, heater shields, reinstall all parts, align and set up the transfer plate, pressure plate and all other related shields plus show how to align the R.F. Etch Head.
Rear Plate
Show how to perform a target & associated shield change, replace the target set screws, change the rear plate shield & cooling rings, rebuild the shutter F/T, perform a proper target burn-in.

Day 7
Wafer Handler
Introduction to wafer handler alignment. Wafer handler alignment tool kit, identification & use. Show how to perform wafer handler alignments & adjustments, using the wafer handler alignment kit if available.

Day 8
Utility Boxes
Show the function & operation of the utility boxes, safety requirements when servicing, component location, how to use the manual for identification of input and output boards.
Diagnostics
Show how to use the system diagnostics.

Wafer handler alignment kit
MKS Instruments test box Mod # PTS-10
Appropriate shop tools & test meters
Standard training room equipment I.E.: overhead projector, 35 mm projector, white marker board, table and chairs for each student etc.